Jane A, Dronov R, Hodges A, Voelcker NH: Porous silicon biosensor

Jane A, Dronov R, Hodges A, Voelcker NH: Porous silicon biosensors on the advance. Trends Biotechnol 2009, 27:230–239. 10.1016/j.tibtech.2008.12.004CrossRef 8. Kovacs A, Jonnalagadda P, Mescheder U: Optoelectrical detection system using porous silicon-based optical multilayers. Sensors J, IEEE 2011, 11:2413–2420.CrossRef 9. Ouyang H, Fauchet

PM: Biosensing using porous silicon photonic bandgap structures. In Optics East 2005. International Society for Optics and Photonics; 2005:600508–600508. 10. Salem M, Sailor M, Harraz F, Sakka T, Ogata Y: Electrochemical stabilization of porous silicon multilayers for sensing various chemical compounds. J Appl Phys 2006, 100:083520. 10.1063/1.2360389CrossRef 11. Ruminski AM, Barillaro G, Chaffin C, Sailor MJ: Internally referenced remote sensors for HF and Cl 2 using reactive porous silicon photonic crystals. Adv Funct Mater 2011, 21:1511–1525. 10.1002/adfm.201002037CrossRef BI 6727 12. Handbook of Optics: Handbook of Optics. New York: McGraw-Hill; 1995:2. 13. Kovacs A, Malisauskaite A, Ivanov A, Mescheder U, Wittig R: Optical sensing and analysis system based on porous layers. In The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2013), October 27–31 2013; Freiburg. selleck screening library San Diego: Chemical and Biological Microsystems Society; 2013:275–277. 14. Ilyas S, Böcking T, Kilian K, Reece P, Gooding J, Gaus K, Gal M: Porous

silicon based narrow line-width rugate filters. Opt Mater 2007, 29:619–622. 10.1016/j.optmat.2005.10.012CrossRef 15. Kronast W, Mescheder U, Müller B, Nimo A, Braxmaier C, Schuldt T: Development of a tilt actuated micromirror for

applications in laser interferometry. In MOEMS-MEMS. International Society for Optics and Photonics; 2010:75940O-75940O. 16. Mescheder U, Bauersfeld M-L, Kovacs A, Kritwattanakhron J, Muller B, Peter A, Ament C, Rademacher S, Wollenstein J: MEMS-based air quality sensor. In International Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007, June 10–14 2007; Lyon, France. New York: IEEE; 2007:1417–1420.CrossRef Competing interests The described tunable optical filter and the system concept have been submitted for a patent. Authors’ contributions UM, AK, and AI worked out the idea of dual tunability. UM supervised the master Calpain thesis work of IK and the work on development of the MOEMS tilting system for large deflection angles, and supplied the research activities with fruitful comments. IK conducted the tunability experiments and simulations as a part of his master thesis. AK led all the experimental and simulation activities and supervised the master thesis work of IK. AI developed the fabrication process for the photonic crystals and fabricated them, made initial experimental measurements on tilting, designed the optical system for the miniaturized concept, and made the final formatting and proof-reading of the paper.

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