This study is the first to report MCC etching at such high depths. Flow splitters were installed at the inlet and outlet of the MCC. By simulating the flow of carrier gas through the column, the gas flow was shown to be equally divided between the capillaries of the MCC. TPCA-1 supplier To evaluate the effects of interfering components, we mixed three commonly used chemicals with the simulants. The boiling points of the six components ranged from 78°C to 219°C. This study is the first to report a successful separation
of gas mixtures containing components with close boiling points. This short length of the MCC ensured that components of the mixture were rapidly separated, i.e. within 70 s. The number of
plates was determined to be 12,810 plates/m. The results indicate that the proposed MCC will find applications as a new generation of GC columns. The present study also features several limitations. First, fabrication of the MCC entails high costs. Furthermore, a smaller GC system requires miniaturisation of its component devices. Production of MCCs in a batch-to-batch manner may help reduce costs for commercialisation. Acknowledgements This work was supported by the National Science Foundation of China via Grant Nos. 61176066 and 61101031. It was also supported by the National High-Tech Research & Development Program (Grant No. 2014AA06A510). References 1. Terry S, Jerman J, Angell J: A gas chromatographic air analyzer C188-9 research buy fabricated on a silicon wafer. IEEE Trans. Electron Devices 1880, 1979:26. 2. Ali S, Ashraf-Khorassani M, Taylor LT, Agah M: MEMS-based semi-packed gas chromatography columns. Sensors and Actuators B: Chem 2009,141(1):309.CrossRef 3. Liao MJ, Wang L, Du XS, Xie GZ, Hu J, Jiang YD: Development of MEMS Gas Chromatography Column. Chin Carnitine palmitoyltransferase II J Electron Devices 2011, 4:010. 4. Wang L, Du XS, Hu J, Jiang YD: Research progress of structures
for MEMS gas chromatography columns. Micronanoelectronic Technol 2011,48(10):639. 5. Lewis PR, Manginell RP, Adkins DR, Kottenstette RJ, Wheeler DR, Sokolowski SS, Trudell DE: Recent advancements in the gas-phase MicroChemLab. Sensors J 2006,6(3):784.CrossRef 6. Reston RR, Kolesar ES: Silicon-micromachined gas chromatography system used to separate and detect ammonia and nitrogen dioxide. I. Design, fabrication, and integration of the gas chromatography system. J Microelectromech Syst 1994,3(4):134.CrossRef 7. Matzke CM, Kottenstette RJ, Casalnuovo SA, Frye-Mason GC, Hudson ML, Sasaki DY, Wong CC: Microfabricated silicon gas chromatographic microchannels: fabrication and performance. In see more Proceedings of SPIE: Micromachining and Microfabrication International Society for Optics and Photonics 1998, 3511:262.CrossRef 8. Zaouk R, Park BY, Madou MJ: Introduction to Microfabrication Techniques. Totowa: Humana Press; 2006. 9.